Thermal Vacuum Chamber

The TestEQ thermal vacuum chamber reproduces the combined low-pressure and thermal conditions faced by equipment operating in space, for space simulation and for thermal cycling under vacuum. It provides high-vacuum performance together with an ultra-wide thermal range, allowing vacuum and thermal cycling to be applied at the same time.

Applications

  • Spacecraft, satellite and space equipment testing
  • Aerospace components and instruments
  • Semiconductor equipment and precision components
  • Outgassing and material evaluation under vacuum
  • Components requiring combined vacuum and thermal cycling

Configuration and features

  • High vacuum level to 1.0×10⁻⁷ mbar.
  • No-load vacuum level 5×10⁻⁷ mbar at room temperature.
  • Temperature range -190 °C (liquid nitrogen cooling) to +200 °C.
  • Simultaneous vacuum and thermal cycling capability.
  • Stable pressure regulation across multiple vacuum levels.
  • Chamber, shroud and cooling system configured around the test item and required temperature profile.
  • Patent number CN202510795397.6.

Specifications

Model range

ParameterEZKT 1000-5EZKT 1200-5EZKT 1700-5
Capacity0.402 m³0.785 m³2.65 m³
Thermal shroud internal dimension (straight cylindrical section)ø 800×800 mmø 1000×1000 mmø 1500×1500 mm
Vacuum chamber internal dimension (straight cylindrical section)ø 1000×1000 mmø 1200×1200 mmø 1700×1700 mm
Thermal plate dimension600×500 mm800×700 mm1300×1200 mm

Common specifications

ParameterValue
Capacity range0.5 m³ to 2.65 m³ (customizable)
High vacuum level1.0×10⁻⁷ Torr (1.33×10⁻⁷ mbar)
No-load vacuum level5.0×10⁻⁷ mbar (room temperature)
Pressure regulation in multiple rangesstable operation at 1.0×10⁻², 1.0×10⁻³, 1.0×10⁻⁴, 1.0×10⁻⁵ and 1.0×10⁻⁶ mbar/Torr (room temperature)
Vacuum cube leak rate≤ 1×10⁻⁹ std/cc/sec
Refrigeration modesA: thermal sink + cold plate; B: thermal sink + heating cage; C: liquid nitrogen thermal sink + heating cage
Temperature rangegaseous nitrogen control -180 °C to +200 °C; mechanical refrigeration -80 °C to +150 °C; flooded liquid nitrogen -190 °C
Temperature uniformity±2 °C (measured at any point on the heat sink and cold plate under stable conditions in a vacuum environment)
Rising / falling rate (mechanical cooling)-70 °C to +100 °C ≥ 3 °C/min; +100 °C to -50 °C ≥ 3 °C/min
Rising / falling rate (optional, pressurised GN₂ recirculation)-150 °C to +125 °C ≥ 3 °C/min; +125 °C to -150 °C ≥ 3 °C/min
Vacuum acquisition systemmechanical pump / roots pump / molecular pump / cryopump
PowerAC 380 V, 3-phase, 5-line, 50/60 Hz
PatentCN202510795397.6

System configuration options

System componentStandard configurationCustom configuration
Vacuum vessel✓✓
Chamber volume✓✓
Vacuum pumping system✓✓
Thermal shroud✓✓
Cold plateOptional✓
Heating system✓✓
Cooling system✓✓
Payload fixtureOptional✓
Electrical feedthroughOptional✓
Residual gas analyzer (RGA)Optional✓
Data acquisition systemOptional✓
Thermal balanceOptional✓
Solar simulationOptional✓
Automated control✓✓

Vacuum levels in the 10⁻⁵ to 10⁻⁷ Torr/mbar range are commonly associated with spacecraft TVAC qualification depending on mission requirements.

Standards

Thermal vacuum systems are configured around the customer’s space-simulation or vacuum-thermal test specification. Commonly referenced standards include NASA thermal vacuum testing requirements, ECSS-Q-ST-70-02 spacecraft thermal vacuum testing, MIL-STD-810 low-pressure and temperature testing, and ASTM E595 outgassing testing. To define the chamber, pumping system, shroud and thermal profile, contact us with the test item and required conditions. Related: Altitude (Low-pressure) Test Chamber , Custom Non-standard Test Chamber .

Tell us the test standard and the specimen

Send the standard, the specimen size and heat load, the temperature or pressure range. Our engineers will come back with a chamber configuration.